← SearchDIRECT DIODE PUMPED 100-200KHZ (200W) TI:SAPPHIRE ULTRAFAST LASER SYSTEM FOR COST EFFECTIVE EUV GENERATION IN HOLLOW WAVEGUIDES$2,138,058FY2013Department of EnergyDOEKapteyn-Murnane Laboratories, IncInvestigatorsView source on USAspending →