NEW AWARD; TITLE: PULSED PLASMA WITH SYNCHRONOUS BOUNDARY VOLTAGE FOR RAPID ATOMIC LAYER ETCHING; PI - DEMETRE ECONOMOU
$937,687FY2009Department of EnergyDOE
University Of Houston System
Investigators
View source on USAspending →NEW AWARD; TITLE: PULSED PLASMA WITH SYNCHRONOUS BOUNDARY VOLTAGE FOR RAPID ATOMIC LAYER ETCHING; PI - DEMETRE ECONOMOU · GrantIndex