MRI: Acquisition of an Atomic Layer Deposition (ALD) System

Georgetown University, Washington DC

Investigators

Abstract

The objective of this research is to advance several programs in nanoscale materials and devices in Georgetown University?s Physics/Chemistry departments through acquisition of an atomic layer deposition system ? a fundamental tool for nanotechnology applications. The system will complement the existing micro-/nano-fabrication processing instrumentation within the Georgetown Nanoscience & Microtechnology Laboratory shared cleanroom facility. The intellectual merit is to advance the nanoscience component of several funded and pilot research projects. If awarded, the atomic layer deposition system?s utility will have an immediate impact on projects including: synthesis of application-specific porous and magnetic nanoparticles; deposition of ultra-thin-films for micro-/nano-structure fabrication; and development of ultra-sensitive carbon nanotube field-effect transistors for bio-chemical sensing, terahertz detection, and superconductivity studies. The approach is to provide easy accessibility of the deposition tool to the PIs and other science faculty by housing it in the shared cleanroom. External use of the system from within and outside Georgetown University will be encouraged. The broader impact of an in-house atomic layer deposition system will be expansion of the internal/external user-base, thereby creating opportunities for new collaborations. The system will be an educational tool for graduate and advanced undergraduate physics/chemistry curricula. Many projects will serve as a platform to stimulate and enhance science education and generate excitement in high technology sectors such as micro-electromechanical systems, nanotechnology, and materials engineering. All PIs have actively involved high school and undergraduate students in their research programs, and will continue to expand their respective outreach activities, such as increasing participation by underrepresented groups.