SBIR Phase II: Novel PECVD (Plasma Enhanced Chemical Vapor Deposition) Single Layer Thin Film Encapsulation for Organic Devices

Universal Display Corporation, Trenton NJ

Investigators

Abstract

This Small Business Innovation Research (SBIR) Phase II project aims to develop a high-rate and large-area manufacturing process for a non-toxic barrier coating that can be used in flexible display and other applications. A flexible single-layer and environmentally-friendly barrier that has both inorganic and organic properties will be used to allow a much thinner barrier to be effective, thus significantly reducing the manufacturing costs. The broader/commercial impact of this project will be the development of a cost-effective thin film encapsulation technology to enable a wide range of applications such as emerging display, imaging, battery and power generating technologies. These applications require a flexible, low-cost, and mostly transparent, thin permeation barrier to prevent oxygen and moisture from causing degradation. In this project, large-area scalability and ability to encapsulate devices made on flexible substrates will be addressed.