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HIGH-PURITY II-AS/SILICON MBE REACTOR FOR AN IMF BASED LATTICE-MISMATCHED-SEMICONDUCTOR INTEGRATION CLUSTER TOOL

$299,751FY2009Department of the NavyDOD

University Of California, Los Angeles

Investigators

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HIGH-PURITY II-AS/SILICON MBE REACTOR FOR AN IMF BASED LATTICE-MISMATCHED-SEMICONDUCTOR INTEGRATION CLUSTER TOOL · GrantIndex