MRI: Acquisition of a Low Pressure Chemical Vapor Deposition System for Applications in Micro/Nano Technology

University Of Louisville Research Foundation Inc, Louisville KY

Investigators

Abstract

MRI: Acquisition of a Low Pressure Chemical Vapor Deposition System for Applications in Micro/NanoTechnology Dr. S. McNamara, University of Louisville The objective of this research is to add a Low Pressure Chemical Vapor Deposition (LPCVD) system to the new nanofabrication cleanroom at the University of Louisville. This tool is used to deposit high quality thin films of polysilicon and silicon nitride (stoichiometric and low-stress) on silicon substrates. Intellectual merit: The LPCVD system will enable researchers at UofL to deposit stress-controlled thin films for a variety of research projects, including for nanotechnology (MEMS Origami), for electronic devices (transistors), for MEMS devices (on-chip gas pumping, piezoelectric sensor platform, gas phase preconcentrators for chemical detection, microfluidic devices for solid particle formation), for acoustic devices (broad-band frequency ultrasonic transducer arrays, miniature microphones), for optics (optical planar UV waveguides), and for bioMEMS (continuous apheresis, lab-on-a-chip). The broader impacts of this proposal include supporting an undergraduate microfabrication laboratory (ECE 101), a graduate microfabrication laboratory (ECE 544), supporting two minority PIs and one female PI, and supporting numerous minority students, female students, and students from economically disadvantaged regions in Kentucky. Outreach efforts include continued participation of high school students in the KY State Science Fair program and through the Biotech Fellows program. The LPCVD system will be utilized by its many external users, including students and researchers at both 4-year and research universities within and around Kentucky, national laboratories, local Kentucky industries, and cleanroom-related startup companies. Benefits to society include improvements in homeland security, environmental testing, bedside diagnostics, new and cheaper methods of manufacturing nanomaterials, and better tools for biomedical research.