MRI: Acquistion of Dual Beam FIB/SEM for Nanofabrication

California Institute Of Technology, Pasadena CA

Investigators

Abstract

0421543 Scherer This proposed instrumentation acquisition is that of a dual-beam focused ion beam scanning electron microscope (FIB/SEM) system, with which the involved research team intends to investigate electromagnetic phenomena at the nanometer scale. The involved research 'team' includes three collaborative elements. CalTech will take the lead, JPL will provide supplemental input, and the FIB/SEM vendor (i.e., FEI Inc.) will not only furnish the basic hardware but will interactively assist CalTech students and faculty in their efforts with software optimization.