An Integrated Femtosecond and Nanosecond Dual Beam Laser System for Microfabrications

Missouri University Of Science And Technology, Rolla MO

Investigators

Abstract

The objective of this grant is to seek a new method to simultaneously achieve high throughput, high precision, and high versatility for laser micromachining of wide band-gap dielectrics and semiconductors. The objective can be achieved with an integrated femtosecond and nanosecond dual-beam laser system by combining and enhancing the advantages of each individual laser. The innovative idea is to use the femtosecond laser to generate free electrons so that the photon absorption characteristics of the material can be fundamentally changed for the subsequent nanosecond ablation. A multiscale model, consisting of a molecular dynamics model, a plasma model with quantum treatments, and an improved two-temperature model, will be developed to understand the governing physics during the dual-beam laser ablation process. An improved Taguchi method will be employed to systematically design the experimental matrix to validate the modeling predictions and to identify key process parameters. If successful, this research will result in an improved understanding of laser-material interactions, with applications to broad industries, including MEMS, micro-optics, biotechnology, information technology, materials science, medicine industry, and others. The project will support and train two minority graduate students and the results to be discovered will be incorporated into several new and existing courses.