SGER: Micromachined Floating Element Skin Friction Sensor Technology

University Of Florida, Gainesville FL

Investigators

Abstract

ABSTRACT PROPOSAL NO.: CTS-0352835 PRINCIPAL INVESTIGATORS: MARK SHEPLAK INSTITUTION: UNIVERSITY OF FLORIDA SGER: MICROMACHINED FLOATING ELEMENT SKIN FRICTION SENSOR TECHNOLOGY This is an exploratory research program for the development of silicon-micromachined floating-element shear-stress sensors via modeling, optimization and preliminary fabrication of a "proof of concept" device. The goal is to perform preliminary research on a novel measurement tool for fundamental fluid mechanics research. The intellectual merit of the proposed activities will benefit two scientific communities. In the MEMS community, the research will utilize innovative fabrication techniques and multidisciplinary optimization to realize a research instrumentation-grade wall-shear stress sensor. Specifically, a novel, lateral ion-implanted, piezoresistive floating element sensor using an integrated-circuit compatible manufacturing process yielding a device possessing electronic through-wafer backside contracts will be developed. This microfabrication contribution will result in a truly flush-mounted, direct wall shear stress sensor, with the electrical leads and wire bonds hidden from the flow field resulting in a robust sensor for gas or liquid applications that induces negligible flow disturbances. In the fluid mechanics community, the realization of this sensor will greatly extend the spatial and temporal resolution capabilities as well as the accuracy of skin friction measurement technology. Once developed, this technology will be employed to help elucidate the fundamental physics of both two- and three-dimensional turbulent boundary layers possessing variable pressure gradients in both air and water facilities. These activities will broadly impact measurement technology. Successful realization of the sensor will provide a critical measurement capability for the turbulence research community, the aerospace industry, and biomedical research community.