Multi-Scale, Multi-Physics Modeling and Characterization of Electrothermal Transport in RF MEMS Microcontacts

Regents Of The University Of Michigan - Ann Arbor, Ann Arbor MI

Investigators

Abstract

0330963 Kurabayashi This research program investigates the multi-physics phenomena at MEMS-scale contacts to permit reliable design of RF MEMS switches for a wide variety of applications taking advantage of RF MEMS technology. This project aims to develop models for the MEMS-scale contact asperity heating at varying contact force, contact area geometry, surface conditions, and asperity mechanics. Such models will allow the development of design rules and new RF MEMS geometries which extend their lifecycle and power-handling capability.