MRI: Acquisition of a Micro Scanning Vibrometer System

University Of Illinois At Chicago, Chicago IL

Investigators

Abstract

The Objective of the Proposed Activity The objective of this proposal is to acquire the Polytec PI Micro Scanning Vibrometer (MSV-300) for research and educational use at the University of Illinois at Chicago (UIC). The Micro Scanning Vibrometer (MSV) is an ideal instrument for mapping the deflections of Microelectromechanical Systems (MEMS) structures. Employing state-of-the-art laser technology and a computer software driven data acquisition system, the instrument can measure acceleration, velocity and displacement of points on tiny vibrating microstructures, and provide live 3-D animations of the response mode shapes of the microstructures. The MSV includes two-channel FFT data acquisition, a fiber-optic vibrometer sensor, microscope adapter, piezo-scanning system, remote control functions and specialized software. The Intellectual Merit of the Proposed Activity Four laboratories in three engineering departments at UIC are actively involved in sponsored research projects on development of a variety of novel MEMS transducers, many of them in collaboration with various departments in the UIC Medical school, that correspond to over $3.5M in grants (either funded or pending) from various federal agencies including NSF. Examples of these novel MEMS projects include actuators and microfluidic devices for sub-retinal prosthesis, medical diagnostic vibro-acoustic sensors, multi-channel neural probes, and liquid drop actuated micro-mirrors. The feature sizes of these MEMS are on the order of a few micrometers and their resonant frequencies are on the order of a few Hertz to several MHz. A very important component central to all of these research projects is the identification of system dynamics, which presents many difficult challenges. Due to the micro scale of these structures, conventional dynamic characterization methods are not feasible. Coarse frequency evaluations may be possible in some cases using certain single-point optical sensors; however, they are not practical for obtaining detailed mode shape data of the test specimen. Additionally, they are limited by bandwidth and resolution. Currently no instruments are available at UIC or nearby institutions to fully characterize the dynamic behavior of MEMS structures in these projects. Broader Impacts of the Proposed Activity The proposed equipment will significantly impact the quality of research and education, and diversity programs at UIC, and also the advancement of local institutions and private companies: Research MSV would enable UIC researchers to acquire high quality modal data in MEMS structures that is not possible by any other technique, and thus, significantly enhance the quality of the ongoing and anticipated future research. It would also help catalyze new research activity. Education The equipment will be used to offer hands-on instruction in cutting-edge technology to supplement classroom theory taught in many existing and new courses planned in the areas of dynamics and MEMS testing at UIC; this will highly enrich the quality of education. Diversity UIC offers special programs at both the undergraduate and graduate level to attract and mentor members of underrepresented groups in the sciences and engineering. The availability of equipment would further enrich the education of students in these programs. Industry The Microfabrication Applications Laboratory at UIC is currently used by over 50 external users from several local academic institutions and companies in the greater Chicago area. Many of the users have expressed interest and need for the proposed MSV. This equipment will foster more partnerships with local industry, promote innovation in MEMS/nanotechnology, and help local businesses to contribute to economic development in the Midwest.