Establishing an Industrial/University Cooperative Research Center for Micro and Nanoscale Contaminant Control at the University of Arizona

University Of Arizona, Tucson AZ

Investigators

Abstract

The Industry/University Cooperative Research Center (I/UCRC) for Microcontaminiaiton Control will expand and change its focus by transferring the lead university role to Northeastern University with the University of Arizona becoming an affiliate site. The Center's goal is to develop state of the art techniques primarily for micro and nanoscale contaminant control, removal and characterization in semiconductor manufacturing and fabrication processes. However, the broader impact of the Center focus will contribute to the competitiveness of the semiconductor, information technology, pharmaceutical, imaging, aerospace and other industries affected by particulate and ionic contamination.