Microsensor and Actuator I/UCRC

University Of California-Berkeley, Berkeley CA

Investigators

Abstract

MEMS is an important research field with promise of significant applications in a variety of areas, including healthcare, security, safety, and power conservation. Commercial applications range from micro-accelerometers, to micro-pumps, to million mirror projection displays, to self-discovering networks of wireless sensors, to optical micro-scanners. NSF participation in this important area of nanotechnology will further stimulate research and development of micro and nano devices and have a significant impact on improving the design, manufacture, accuracy, and utilization of these and other devices. Such investments by NSF will ultimately have a significant and beneficial effect on the economic health and global competitiveness of the United States. This award is the second 5-year phase of the Industry/University Cooperative Research Center for Micro-sensors and Actuators. In 1998, the I/UCRC Berkeley Sensor and Actuator Center (BSAC) was extended from on-going research in this area to research in new areas with a multi-university component at UC-Davis.