Integrated Sensing: CMOS Intgerated Gas Sensor Array Chip Using SAW Technology

George Washington University, Washington DC

Investigators

Abstract

0225431 Zaghloul For the purposes of public safety, health and wellness, it is often critical to have available smart sensors that can detect and identify toxic and poisonous gases in the air. Here the PIs seek low cost arrays of SAW gas sensors clustered as a network node that can be placed and operated with minimal supervision, yield continuous real time monitoring capability through the network and are based on well established CMOS/MEMS technology. Since the sensors are fabricated employing CMOS technology, additional signal processing circuitry can easily be integrated into the chip thereby readily providing functions, such as, multiplexing and analog-to-digital conversion, i.e., Systems On a Chip (SOC). The proposed CMOS design offers other potential benefits, such as, temperature drift control and noise immunity. The chips will be designed at The George Washington University and fabricated by the MOSIS service. Select post-fabrication steps will be performed by the MEMS Exchange and the Naval Research Laboratory (NRL), Chemistry Division. This proposal addresses the critical research issues, estimated time line of tasks and educational opportunities for undergraduate and graduate students.