SBIR Phase II: ELEX - Innovative Low-Cost Manufacturing Technology for High Aspect Ratio Microelectromechanical Systems (MEMS)

Microfabrica, Inc., Burbank CA

Investigators

Abstract

This Small Business Innovation Research Phase (SBIR) II project will further develop ELEX (Electro-Extrusion) which is a manufacturing process for prototyping and batch manufacturing high-aspect ratio microelectromechanical systems (MEMS) and related microparts and microstructures. The goal is to replace (in many applications) the so-called LIGA process, which is an electrodeposition-based technique, requiring the use of a clean room and synchrotron. The commercialization potential of this project to the MEMS industry will provide a dramatic reduction in cost and time, which will greatly accelerate the commercialization of MEMS and other microscale devices.