Establishing an I/UCRC Center Site for Microcontamination Control at Northeastern University

Northeastern University, Boston MA

Investigators

Abstract

The Industry/University Cooperative Research Center research site at Northeastern University will work jointly with the industrial members and the existing Microcontamination Control center at the University of Arizona and Rensselaer Polytechnic Institute to develop solutions that will improve the industry's yield and contribute to their competitiveness. The industrial members at all three sites will share the research results of all the sites. The research focuses on the fundamentals of surface cleaning and preparation, particle adhesion and removal mechanisms, reduction of the use of chemicals through dilute chemistries, cryogenic aerosols and supercritical fluids (such as supercritical CO2) and reduction of water use through increased cleaning efficiency. Contamininants in gases will also be addressed through physical modeling of particle generation, transport, deposition resulting in contamination in thin film process. The center will also work toward the development of micro-sensors that can be used to detect impurities insitu in ultra pure gases used in semiconductor and other processes.