NER: Ultrafast Laser-Assisted Scanning Probe Fabrication of Nanostructues

University Of California-Berkeley, Berkeley CA

Investigators

Abstract

Basic exploratory research is performed on nanoscale surface engineering through means of ultra-fast, pulsed laser radiation coupled with near-field scanning probe microscopy. A new experimental apparatus consisting of a femtosecond laser source coupled with a scanning AFM/STM system is used for this purpose. Depending on the process parameters, high-definition nanomachining and nanodeposition can be achieved. The effects of the laser intensity distribution, wavelength, and polarization are examined in relation to the sample/probe tip material parameters. The integrity, durability, mechanical, chemical and electrical structural properties of the produced nanofeatures are characterized by various micro-analytical techniques. The long-term objective is the development of functional relationships between key process parameters, patterning features, and material properties of the modified surfaces that will enable nanostructure optimization.