Analytical, Fundamental and Instrumental Developments in Secondary Ion Mass Spectrometry (SIMS)

Arizona State University, Scottsdale AZ

Investigators

Abstract

The research project submitted by Dr. Peter Williams and Dr. Richard Hervig of Arizona State University entitled "Analytical, Fundamental and Instrumental Developments in Secondary Ion Mass Spectrometry (SIMS)" is supported by the Analytical and Surface Chemistry Program. The goals for the project are 1) to develop methods for real-time, quantitative analysis on the influence of oxygen on sputtered ion yields. 2) Fundamental studies in sputtered neutral analysis. This will include establishing mechanism of ionization and studying contamination problems. 3) To explore massive cluster ion source experiments for gathering information on sputtering yields and behavior. The quantitative, real-time measurements are innovative and well thought out. The massive cluster impact source experiments are challenging, and of great interest for the depth profiling of semiconductors and biological surfaces. There are potential societal impacts from this research because the quantitative calculation of impurity content and distribution at shallow depths could significantly improve microelectronics manufacture. The fundamental research is important to the field of surface mass spectrometric analysis.