Interface and Evolution Methods For Semiconductor Processing

University Of California-Berkeley, Berkeley CA

Investigators

Abstract

The research work will concern mathematical and numerical aspects of semiconductor manufacturing, specifically to work on problems of microstructural reliability, including aspects of electromigration and chemical mechanical polishing. The work will be combination of mathematical modeling to produce reasonable physical models, complete with appropriate boundary conditions and internal dynamics, and numerical algorithms, in part relying on algorithms for surface evolution and elliptic solvers in irregular domains. The goal will be numerical simulations and comparisons with experiment. Dr. L. Borucki from Motorola Corporation will take this Senior Research Fellowship in the Department of Mathematics at the University of California- Berkeley. This GOALI project is jointly supported by the MPS Office of Multidisciplinary Activities (OMA) and the Division of Mathematical Sciences (DMS).