SGER: A VLSI-Like Design Methodology for Nanoelectromechanical Systems

University Of Illinois At Urbana-Champaign, Urbana IL

Investigators

Abstract

This project is aimed at developing a VLSI-like design methodology for Nano-electro-mechanical Systems (NEMS). Specifically, computer-aided design (CAD) tools are being developed for functional and compact modeling of nano-electro-mechanical devices. Unlike macroscopic and some microscopic devices, where continuum physical principles are valid, at nanoscales it is important to account for granular nature of the devices. A multiscale approach combining the lowest level atomistic approaches to the highest-level continuum theories are being developed for functional modeling of NEMS. The development of compact models is being investigated to enable design of large and interconnected-array of NEM devices. Finally, carbon nanotube based NEMS are being investigated as basic building blocks for nanoscale sensors, actuators, devices and systems.