New Technologies for the Environment: Vapor Deposition of Photoimageable Dielectric Films

Arizona State University, Scottsdale AZ

Investigators

Abstract

This New Technologies for the Environment project will demonstrate the proof-of-concept for vapor deposition of photoimageable dielectric polymer films through an integrated experimental investigation that will provide fundamental understanding of thin film processing, properties and performance capabilities and limitations. If successful, this research will lay the foundation for realization of significant environmental advantages in printed circuit board manufacture and in advanced microelectronics packaging. The inherent photosensitivity of the polymer films will allow the elimination of a significant number of waste-generating process steps from the overall manufacturing process flow, and the production of the thin films through vapor deposition will eliminate solvent wastes in precursor production, thin film application, and shelf-life expiration. This research will address key barrier issues inhibiting the implementation of photoimageable dielectric technology. Focus will be on auto-photosensitive film deposition from pyromellitic dianhydrides and co-monomers from the ortho-aliphatic di-substituted diaminodiphenylmethane series. Life Cycle Analyses will be conducted to demonstrate the environmental benefits of the technology including minimal emissions, solvent-free film production, and high precursor utilization.