Micro-four-point Probe

Georgia Tech Research Corporation, Atlanta GA

Investigators

Abstract

0080931 Hesketh An investigation of new methods for micro-scale impedance and surface potential mapping of surfaces will be undertaken. The AFM microscope has been modified to carryout micro-scale two and four point probe impedance mapping, and micro-Kelvin surface potential mapping. Custom tips will be microfabricated with multiple tips on a single cantilever, and multiple cantilevers on a chip. The principle of operation is similar to the macro four-point probe except the microfabricated four-point probe will perform better in several respects. First, the testing will yield sub-micron precision mapping of conductivity, doping profiles and surface potential, be non-destructive and will providing quantitative data from an ambient environment, scanning probe platform. Graduate student training will be provided in surface probe microscopy and MEMS fabrication methods. Commercialization of these analysis methods will be facilitated by the probes compatibility with existing AFM technology.