CAREER: High-Intensity Laser Irradiation of Microstructures

University Of Illinois At Urbana-Champaign, Urbana IL

Investigators

Abstract

ABSTRACT High-Intensity Laser Irradiation of Microstructures A series of experimental and analytical techniques will be used to determine the thermal and mechanical responses of microstructures exposed to laser irradiation. Arrays of microcantilevers will be fabricated using surface micromachining techniques and irradiated by lasers with varying pulse widths and wavelengths. The deflections of a microcantilever will be monitored as a function of time. Temperature and thermal expansion measurements will also be conducted. The experimental results will be compared to predicted temperatures and deflections. Also, an educational plan will be implemented to increase the number of women in engineering and to develop interdisciplinary microscale phenomena courses. An understanding of the behavior of microstructures exposed to radiation is required for applications like room temperature infrared sensing, microelectromechanical systems (MEMS) for satellites and space vehicles, and laser processing. This research project examines the interaction of laser radiation with microstructures concentrating on a novel laser process for repairing microcantilevers adhered to the substrate.