Advanced Mechanical Testing of MEMS Materials

Johns Hopkins University, Baltimore MD

Investigators

Abstract

Microelectromechanical systems (MEMS) are tiny pressure transducers, accelerometers, etc. having features as small as 1 micrometer and fabricated from vapor-deposited polycrystalline silicon and similar materials. The first objective of this research is to develop techniques and procedures for tensile testing of these materials in order to determine whether the size of the specimen and the complexity of the stress affect their properties. The second objective is to develop new test methods to cycle tiny specimens in tension and measure their response to cyclic loading. Material properties of these new structural materials are required for intelligent design and life prediction of novel microdevices.***